Silicon carbide wafer Sic 6H-P type Off axis: 2.0° toward
Production Grade Research Grade
Type 6H-P Sic is made of advanced semiconductor material
preparation process with specific crystal structure and doping
type. Among them, "6H" represents the crystal structure type of
silicon carbide, which belongs to a hexagonal crystal system;
"P-type" indicates that the substrate is doped so that the holes
become the main carrier type. The design with an off-axis Angle of
2.0° helps to optimize the performance of the crystal in a specific
direction to meet the needs of specific application scenarios.
Features:
1. High doping concentration: 6H-P type Sic achieves a high concentration of hole carrier
distribution through a specific doping process, which helps to
improve the electrical conductivity and switching speed of the
device.
2. Low resistivity: Due to the high doping concentration, the substrate exhibits low
resistivity, which helps to reduce the energy loss of the device
during operation.
3. Good thermal stability: Sic material itself has a very high melting point, making 6H-P
substrate can maintain stable performance in high temperature
environment.
4. Excellent mechanical properties: Sic material has high hardness, wear resistance and other
characteristics, making 6H-P substrate can withstand greater
mechanical stress in the manufacturing process.
5. Off-axis Angle optimization: The design of the off-axis Angle is 2.0°, so that the performance
of the substrate is optimized in a specific direction, which helps
to improve the overall performance of the device.
Technical Parameter:
2 inch diameter Silicon Carbide (SiC) Substrate Specification
等级 Grade | 工业级 Production Grade (P Grade) | 研究级 Research Grade (R Grade) | 试片级 Dummy Grade (D Grade) |
| 直径 Diameter | 50.8mm±0.38mm |
| 厚度 Thickness | 350 μm±25 μm |
| 晶片方向 Wafer Orientation | Off axis: 2.0°-4.0°toward [1120] ± 0.5° for 4H/6H-P, On axis:〈111〉± 0.5° for 3C-N |
| 微管密度 Micropipe Density | 0 cm-2 |
| 电阻率 ※Resistivity | 4H/6H-P | ≤0.1 Ω.cm |
| 3C-N | ≤0.8 mΩ•cm |
| 主定位边方向 Primary Flat Orientation | 4H/6H-P | {10-10} ±5.0° |
| 3C-N | {1-10} ±5.0° |
| 主定位边长度 Primary Flat Length | 15.9 mm ±1.7 mm |
| 次定位边长度 Secondary Flat Length | 8.0 mm ±1.7 mm |
| 次定位边方向 Secondary Flat Orientation | Silicon face up: 90° CW. from Prime flat ±5.0° |
| 边缘去除 Edge Exclusion | 3 mm | 3 mm |
| 总厚度变化/弯曲度/翘曲度 TTV/Bow /Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm |
| 表面粗糙度※ Roughness | Polish Ra≤1 nm |
| CMP Ra≤0.2 nm |
| 边缘裂纹(强光灯观测) Edge Cracks By High Intensity Light | None | 1 allowed, ≤1 mm |
| 六方空洞(强光灯观测) ※ Hex Plates By High Intensity Light | Cumulative area≤1 % | Cumulative area≤3 % |
| 多型(强光灯观测) ※ Polytype Areas By High Intensity Light | None | Cumulative area≤2 % | Cumulative area≤5% |
Si 面划痕(强光灯观测)# Silicon Surface Scratches By High Intensity Light | 3 scratches to 1×wafer diameter cumulative length | 5 scratches to 1×wafer diameter cumulative length | 8 scratches to 1×wafer diameter cumulative length |
| 崩边(强光灯观测) Edge Chips High By Intensity Light light | None | 3 allowed, ≤0.5 mm each | 5 allowed, ≤1 mm each |
硅面污染物(强光灯观测) Silicon Surface Contamination By High Intensity | None |
| 包装 Packaging | Multi-wafer Cassette or Single Wafer Container |
Notes:
※Defects limits apply to entire wafer surface except for the edge
exclusion area. # The scratches should be checked on Si face only.
Applications:
- Power devices: Type 3C-N SiC substrates are widely used in voltage-controlled
silicon carbide MOSFET devices, especially in the field of medium
voltage (below 1200 V).
- High frequency communication equipment: Because of its excellent high frequency performance, type 3C-N SiC
is used as the core material of high frequency communication
equipment.
- Power electronics: Type 3C-N SiC substrates are suitable for the field of power
electronics, especially in power conversion equipment with high
performance and high reliability.
- Aerospace and Military: With its high strength and high temperature resistance, type 3C-N
SiC is used in aerospace and military equipment.
- Medical equipment: Its corrosion resistance and high precision make it also a
potential application in medical devices.
Sample display:
FAQ:
