Customized SiC Ceramic Guide Rail Zero-Wear Corrosion-Resistant
High-Speed
The SiC Ceramic Guide Rail is a core motion component utilized
in ultra-precision equipment (such as high-end lithography
machines and wafer inspection systems). It operates by employing high-pressure gas (air or inert gas)
to form a micrometer-level air film (typically 3-20μm thick)
between the guideway and the moving components, enabling
completely non-contact, frictionless nanoscale precision
motion. Its core value lies in providing ultra-high precision, high
speed, high stability, and zero-wear motion solutions for
semiconductor manufacturing, precision optics, and other fields.
SiC Ceramic Guide Rail Characteristics
The silicon carbide (SiC) aerostatic guideway achieves
exceptional performance through the synergistic combination
of its inherent material properties and unique aerostatic
principle. It delivers nanoscale motion accuracy (e.g., positioning
accuracy ±0.15μm, repeatability ±75nm or even higher, motion
straightness ±0.1-0.5μm, and arc-second level attitude control) due
to SiC's extreme hardness, stiffness, and stability, coupled with a
frictionless air bearing mechanism . This system enables true zero-friction motion, ensuring
lifelong precision stability, maintenance-free and
cleanroom-compatible operation, while supporting high-speed (1
m/s) and high-acceleration (4 G) movement . Its excellent thermal stability, attributed to an ultra-low
coefficient of thermal expansion (~4.5×10⁻⁶/K), minimizes thermal
deformation to 1/5 of traditional metal guides, allowing it to
maintain nanoscale accuracy during prolonged operation and resist
chemical corrosion . Despite relying on an air film, high stiffness (>500 N/μm)
is achieved via optimized bearing design and SiC's high elastic
modulus (410 GPa), effectively suppressing vibrations with the air
film's damping effect and active isolation systems . Furthermore, the guideway offers modularity and customizability
for multi-axis setups, travel length (100-1000mm), and load
capacity (5-50kg), often incorporating a precise cable management
system to avoid motion interference.
SiC Ceramic Guide Rail Application
The silicon carbide (SiC) aerostatic guideway serves as a
critical precision motion component across multiple high-end
manufacturing sectors due to its exceptional stability, zero
friction, and nanoscale accuracy. It is indispensable in
semiconductor manufacturing and inspection, particularly as the
core of the wafer stage in EUV lithography systems, where it
enables sub-nanometer scanning and positioning, directly impacting
overlay accuracy and line width uniformity, and is also widely
used in wafer defect inspection and electron beam inspection
systems for high-speed, high-precision scanning. In precision
optical manufacturing and metrology, it provides reference motion
for ultra-precision optical processing equipment (e.g., aspheric
mirror fly-cutting), laser interferometers, and high-precision
measuring machines. Within aerospace and defense, it ensures
accuracy and reliability in extreme environments for applications
such as satellite laser communication assembly, high-resolution
space remote sensing satellites, and inertial navigation systems.
Additionally, it is increasingly adopted in emerging technologies
and advanced research, including precision equipment for
biomedicine (e.g., gene editing micro-manipulation) and quantum
computing (e.g., quantum chip fabrication), leveraging its ability
to meet the stringent demands of these frontier fields.
SiC Ceramic Guide Rail Parameters
| Parameter | Typical Value / Range | Significance |
| Coefficient of Thermal Expansion | 4.5×10⁻⁶/K (0-1000°C) | Extremely low value, excellent thermal stability, ensures minimal
size change under temperature fluctuations, matches silicon wafers
well. |
| Hardness | Mohs 9.5, Vickers HV2500 | Extremely high hardness, second only to diamond, endows the
guideway with exceptional wear resistance and long service life. |
| Elastic Modulus | 410 GPa or higher | High elastic modulus signifies high stiffness, effectively
resisting load-induced deformation, ensuring smooth and precise
motion. |
| Thermal Conductivity | 150-400 W/m·K | High thermal conductivity aids in rapid temperature
equilibration, reduces thermal gradients, and avoids local thermal
deformation. |
| Density | ~3.1 g/cm³ | Compared to many metals, it contributes to component lightweighting
while providing high stiffness. |
ZMSH Service
Customization Services for SiC Aerostatic Guideways:
•Material composition
•Geometry & dimensions
•Multi-axis integration
•Performance parameters
•Surface finishing
•Embedded sensors
•Modular assembly
Core advantages maintained:
•Thermal stability
•Zero wear
•Nanoscale accuracy
SiC Ceramic Guide Rail Q&A
Q1: What is the main purpose/application of a silicon carbide (SiC)
aerostatic guideway?
A1: It is primarily used as the core motion component in the
wafer stage of lithography machines (especially EUV lithography)
to achieve and maintain nanometer-level positioning accuracy
for semiconductor manufacturing.
Q2: Why is silicon carbide (SiC) material used for aerostatic
guideways?
A2: Silicon carbide is chosen for its extremely high hardness
(close to diamond), low thermal expansion coefficient, high
stiffness, and exceptional wear resistance, which collectively
ensure long-term stability, zero wear, and resistance to thermal
deformation under precise motion conditions.
Tags: #SiC Ceramic Guide Rail, #Customized, #Zero-Wear, #Corrosion-Resistant, #High-Speed
