SiC Ceramic Optical Path Board for Wafer Inspection Equipment
Parallelism ≤0.02mm
A Silicon Carbide (SiC) Optical Path Board is a high-precision
optical substrate manufactured from ultra-high-purity silicon
carbide ceramic, specifically designed for dual optical path
systems in wafer inspection equipment. It leverages the core
material properties of silicon carbide—exceptional hardness,
ultra-low coefficient of thermal expansion, high thermal
conductivity, and high refractive index—to provide a stable,
thermally stable reference platform for optical sensors and
imaging systems. Through precision grinding and polishing
processes, it achieves nanoscale flatness and surface
roughness. Its excellent chemical inertness and high
stiffness ensure long-term performance in harsh semiconductor
manufacturing environments, significantly enhancing inspection
accuracy and equipment reliability.
SiC Ceramic Optical Path Board Key Technical Data
Parameter Category | Parameter Name | Typical Value/Range |
Material Characteristics | Material Purity | SiC ≥99.999% |
Coefficient of Thermal Expansion | ~4.5×10⁻⁶/℃ |
Thermal Conductivity | 120–270 W/(m·K) |
Refractive Index | 2.6–2.7 |
Elastic Modulus | >400 GPa |
Functional Characteristics | Surface Flatness | ≤1 μm |
Surface Roughness (Ra) | ≤0.01 μm |
Operating Temperature | -50℃ ~ 500℃ |
SiC Ceramic Optical Path Board Characteristics
| Feature Category | Parameter Name | Value/Specification |
| Weight Optimization | Ultra-Lightweight | Achieved via structural design and material selection
|
| Environmental Stability | Ultra-High Stability | Exceptional resistance to thermal/mechanical stress
|
| Thermal Performance | Coefficient of Thermal Expansion | Ultra-Low (e.g., ~4.5×10⁻⁶/℃)
|
| Mechanical Property | Stiffness | High (e.g., Elastic Modulus >400 GPa)
|
| Material Integrity | Density | High (e.g., ≥3.1 g/cm³)
|
| Precision Metrics | Surface Flatness & Parallelism | ≤0.02 mm
|
| Dimensional Capability | Maximum Size | 900 × 900 mm
|
SiC Ceramic Optical Path Board Main Application Areas
Silicon Carbide Optical Path Boards are critically applied in the
following high-end fields due to their outstanding performance:
- Semiconductor Inspection Equipment: Serves as the core substrate in dual optical path systems
for wafer defect detection, film thickness measurement, and
overlay accuracy analysis, ensuring optical path stability and
measurement repeatability.
- AR/VR Optical Systems: Used as a diffractive waveguide lens substrate (e.g., Meta
Orion AR glasses), supporting wide field of view (70°+), low
rainbow artifact display, and lightweight design (density ~3.1
g/cm³).
- High-End Photoelectric Instruments: Functions as an optical platform in laser interferometers
and spectral analysis equipment, reducing thermal drift and
environmental vibration impacts on precision.
- Photovoltaics and New Energy: Applied as a heat dissipation substrate for photovoltaic
inverter power modules, utilizing its high thermal conductivity
to improve cooling efficiency.
About ZMSH
ZMSH specializes in the customized services of silicon carbide
(SiC) optical path boards. With sufficient reserves of
ultra-high-purity silicon carbide raw materials (purity
≥99.999%), and leveraging advanced pressureless sintering and
precision machining technologies (such as nanoscale mirror
polishing and micro-channel processing), it can precisely control
product performance. The company is equipped with fully automated
production lines and a strict quality inspection system,
supporting one-stop customization from design, prototyping to
mass production, covering personalized needs for dimensions,
shapes, hole positions, and functional characteristics (e.g.,
flatness ≤0.02mm). Simultaneously, we possess a comprehensive
global logistics network and a rapid response mechanism to ensure
efficient order delivery, providing high-reliability and
high-performance silicon carbide ceramic solutions for fields
such as semiconductors, optoelectronics, and new energy.
1. Q: What are the key advantages of silicon carbide (SiC) optical
path boards?
A: They offer ultra-low thermal expansion (~4.5×10⁻⁶/℃),
high thermal conductivity (120–270 W/m·K), and exceptional
stiffness (>400 GPa), ensuring nanoscale flatness (≤0.02mm)
and stability under extreme conditions for precision optical
systems.
2. Q: Where are silicon carbide optical path boards commonly
used?
A: They are primarily used in semiconductor wafer inspection
equipment (e.g., dual-optical-path baseplates), AR/VR waveguide
substrates, laser interferometers, and high-power photonic
devices due to their ability to maintain optical alignment and
thermal stability.
Tags: #SiC Ceramic Optical Path Board, #Customized, #Wafer
Inspection Equipment, #Parallelism ≤0.02mm
