Customized SiC Boats Vertical & Horizontal Wafer Carriers
A Silicon Carbide (SiC) Boat is a high-end load-bearing component
manufactured from high-purity silicon carbide (SiC) ceramic
material, specifically designed for high-temperature, corrosive
process environments in the semiconductor and photovoltaic
industries. It is primarily categorized into vertical boats and
horizontal boats:
- Vertical Boats: Typically used in vertical diffusion furnaces for processes
such as oxidation and diffusion, where they vertically carry
wafers, optimizing space utilization and supporting batch
processing.
- Horizontal Boats: Suitable for horizontal diffusion furnaces, operating in
atmospheres containing oxygen (reaction gas), nitrogen
(protective gas), and small amounts of hydrogen chloride. They
horizontally carry wafers at temperatures around 1250°C,
enabling stable thermal processing.
SiC Boats Key Characteristic Parameters
Parameter Category | Parameter Name | Typical Value/Performance |
Material Characteristics | Material Purity | ≥99.99%
|
Coefficient of Thermal Expansion | ~4.5×10⁻⁶/°C
|
Thermal Conductivity | ~45 W/(m·K) (@1200°C)
|
Flexural Strength | >250 MPa
|
Maximum Service Temperature | >1600°C (long-term), short-term tolerance up to 1800°C
|
Functional Characteristics | Surface Finish | Ra < 0.1 μm
|
Corrosion Resistance | Resists etching gases like HCl, HF, and molten silicon erosion
|
Service Life | Can exceed 5 years (significantly better than quartz boats)
|
Application Characteristics | Working Atmosphere | Oxygen, nitrogen, hydrogen chloride, etc.
|
Applicable Processes | Oxidation, diffusion, CVD, annealing, etc.
|
SiC Boats Application Areas
- Semiconductor Manufacturing: Used in processes like diffusion, chemical vapor deposition
(CVD), annealing, and ion implantation to carry silicon wafers
through high-temperature treatments, ensuring process purity and
uniformity. They are indispensable core consumables in integrated
circuit manufacturing.
- Photovoltaic Industry: Widely used in production lines for high-efficiency solar cells
like TOPCon, HJT, and PERC. They support silicon wafers in
LPCVD equipment for processes such as passivation layer
preparation, diffusion, and annealing, enhancing cell conversion
efficiency and yield.
- LED and Third-Generation Semiconductors: Used in processes like GaN epitaxial growth (MOCVD) to carry
sapphire substrates, resisting corrosive gases like NH₃. Also used
in SiC crystal growth as seed crystal holders.
- New Energy and Research: Applied in high-temperature sintering of lithium battery cathode
materials and radioactive material processing in the nuclear
industry, requiring resistance to radiation, corrosion, and high
temperatures.
SiC Boats Features
Product Features of Silicon Carbide Vertical Boats:
- 3D printing integrated forming.
- Base material impurity content <300 PPM.
- CVD silicon carbide coating base material impurity content <5
PPM.
- High thermal conductivity.
- High thermal shock stability.
- Can be customized according to customer designs to create
different tooth types and tooth lengths.
Product Features of Silicon Carbide Horizontal Boats:
- 3D printing integrated forming.
- Base material impurity content <300 PPM.
- CVD silicon carbide coating base material impurity content <5
PPM.
- High thermal shock stability.
- Precision tooth machining.
Q1: Why choose a silicon carbide (SiC) boat over a quartz boat for
semiconductor processing?
A1: SiC boats offer superior high-temperature stability
(withstanding up to 1600-1650°C), significantly longer service life
(years vs. months for quartz), and extreme resistance to thermal
shock and corrosion, reducing particle generation and
contamination risks in processes like diffusion and CVD.
Q2: What are the primary applications of silicon carbide (SiC)
vertical and horizontal boats?
A2: They are primarily used in semiconductor wafer
fabrication (e.g., diffusion, oxidation, CVD, annealing) and
high-efficiency solar cell production (e.g., TOPCon, HJT) to
carry and heat-treat wafers under extreme conditions, ensuring
process purity and yield.
Tags: #SiC Boats, #SiC Crystal Boats, #High-Purity, #Customized, #SiC Ceramics, #Vertical & Horizontal, #Wafer Carriers
