High-Purity SiC Vertical Furnace Tube High-Temperature Resistant
A Silicon Carbide (SiC) Vertical Furnace Tube is a high-performance
ceramic structural component manufactured using processes such as
reaction sintering or chemical vapor deposition (CVD). It
is specifically designed for extreme environments in
semiconductor manufacturing, metallurgy, and high-temperature
industries. By leveraging the core material properties of silicon
carbide—high hardness, high stiffness, low thermal expansion,
high thermal conductivity, and excellent chemical stability—it
maintains exceptional dimensional stability (with a coefficient
of thermal expansion as low as 4.0-5.0×10⁻⁶/K) and structural
integrity under conditions exceeding 1700°C, in corrosive
atmospheres, and during rapid temperature changes. It provides a
reliable material solution for high-temperature processes.
SiC Vertical Furnace Tube Characteristics and Advantages
| Feature Category | Core Advantage | Key Parameters/Performance |
| High-Temperature Stability | Extremely low thermal expansion, high temperature resistance
| Coefficient of thermal expansion 4.0~5.0×10⁻⁶/K (-196°C to
1600°C), maximum service temperature >1700°C |
| Thermal Management | Excellent thermal conductivity, rapid temperature equalization
| Thermal conductivity ≥120 W/(m·K) (room temperature), ~45
W/(m·K) (1200°C) |
| Mechanical Strength | High hardness, high stiffness, resistance to deformation
| Mohs hardness 9.5, elastic modulus 410 GPa or higher |
| Chemical Inertness | Resistance to acids, alkalis, and plasma erosion
| Corrosion rate in strong acid (70% HNO₃) and strong alkali (45%
KOH) <0.2 mg/(cm²·h) |
| Service Life & Reliability | Thermal shock resistance, long life, low maintenance
| Withstands thermal shock testing from 1200°C to room temperature
(quenching) while maintaining structural integrity, and exhibits
dimensional deviation <0.1mm after continuous operation for 2
years in industrial scenarios |
SiC Vertical Furnace Tube Main Application Areas
- Semiconductor Manufacturing: Used as core components such as
wafer boats, liner tubes, and thermal baffles in vertical
diffusion furnaces and CVD reactors, supporting processes like
high-temperature oxidation/diffusion and epitaxial growth,
ensuring wafer processing precision and yield.
- Metallurgy and High-Temperature Processing: Serves as furnace
linings, crucibles, and load-bearing guides in non-ferrous
metal smelting (aluminum, copper, zinc) and steel
manufacturing, withstanding corrosion from molten metal and
high-temperature loads.
- Industrial Kilns and Energy: Applied in tunnel kilns and
shuttle kilns as high-temperature kiln furniture and burner
components, and as corrosion-resistant structural parts in new
energy equipment (e.g., fuel cells).
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SiC Vertical Furnace Tube Q&A
Q1: What is the primary application of a silicon carbide (SiC)
vertical furnace tube?
A1: It is primarily used as a high-temperature reactor tube
in semiconductor diffusion furnaces, CVD systems, and industrial
kilns (e.g., for SiC/GaN epitaxial growth, oxidation, or
annealing processes at 1500–1700°C), providing exceptional thermal
stability and corrosion resistance in extreme environments.
Q2: Why choose silicon carbide over traditional materials for
vertical furnace tubes?
A2: Silicon carbide offers superior high-temperature strength
(up to 1700°C), extreme thermal shock resistance (low CTE
~4.5×10⁻⁶/K), and excellent chemical inertness (resisting acids,
alkalis, and plasma erosion), ensuring long service life, minimal
maintenance, and stable performance in corrosive atmospheres like
HCl or metal vapors.
Tags: #SiC Vertical Furnace Tube, #High-Purity, #Customized, #SiC
Ceramics, #High-Temperature Resistant
