6Inch Vertical Wafer Cassette Box Wafer Transport Container
The 6-inch wafer cassette box is a high-purity,
precision-molded container designed for safe storage,
transportation, and handling of 6-inch (150mm) semiconductor
wafers. It serves as a critical auxiliary component in wafer
fabrication lines, ensuring protection against particulate
contamination, mechanical shock, electrostatic discharge (ESD), and
chemical exposure during intermediate storage and intra-fab
logistics. Manufactured materials (e.g., PFA, PP, or conductive
polymers), it features a modular slot design with graduated
pitch alignment, enabling seamless integration with automated
handling equipment (e.g., robots, AGVs) and process tools (e.g.,
etching, CVD, metrology).
6Inch Wafer Cassette Box Key Advantages & Features
1. Contamination Control: Ultra-low particle generation (<0.5 particles/cm³ @ 0.2μm)
and chemical resistance (acids/alkalis) prevent wafer surface
degradation.
2. ESD Protection: Surface resistivity 10⁶–10⁹ Ω/sq avoids charge buildup and
circuit damage.
3. Mechanical Safety: Rigid yet lightweight structure with shock-absorbing features
minimizes breakage during transport.
4. Automation Compatibility: Standard dimensions and RFID/barcode tags enable seamless
AMHS (Automated Material Handling System) integration.
5. Thermal Stability: Withstands -40°C to 150°C for use in cleanrooms and process
environments.
Primary Application Scenarios of 6Inch Wafer Cassette Box
- Wafer Fabrication Lines: Intermediate storage between
diffusion, etching, and deposition tools.
- Metrology & Inspection: Holding wafers during CD-SEM,
overlay, and defect inspection.
- Back-End Packaging: Transporting wafers to dicing, bonding,
and testing facilities.
- R&D Labs: Prototyping and low-volume processing requiring
manual or automated handling.
Key Parameters of 6Inch Wafer Cassette Box
6Inch Wafer Cassette Box Q&A
1. Q: What size is a 6 inch wafer?
A: A 6-inch wafer has a standard diameter of 150 mm, with a
thickness typically ranging from 625–675 μm.
2. Q: What is a afer cassette?
A: A wafer cassette is a precision container with 25 vertical
slots designed to safely store, transport, and handle
semiconductor wafers in cleanroom environments, preventing
contamination and physical damage.
3. Q: What is the primary function of a 6-inch wafer cassette box
in semiconductor manufacturing?
A: It is designed to safely store, transport, and handle
6-inch (150mm) wafers during semiconductor processes (e.g.,
cleaning, etching, and inspection), providing protection against
contamination, mechanical shock, and electrostatic discharge
(ESD) while ensuring compatibility with automated handling
systems.
Tags: #6Inch Vertical Wafer Cassette Box, #Customized, #Wafer
Transport Container, #6Inch, #Wafer Cassette Box
