Silicon Carbide Ceramic Tray for Semiconductor Wafer Processing
Product Overview
The Silicon Carbide (SiC) Ceramic Tray is a high-performance tray
designed to support semiconductor wafers and other materials in
high-temperature and chemically aggressive environments. Known for
its excellent corrosion resistance, high thermal stability, and
mechanical strength, the SiC tray ensures consistent performance
and reliable support for critical processes such as epitaxy,
diffusion, oxidation, and high-temperature sintering.
SiC trays are widely used in semiconductor manufacturing, advanced
ceramics production, chemical processing, electronics, optical
components, aerospace, automotive, and medical device fabrication.
Specifications
| Property | Value |
|---|
| Material | High-purity Silicon Carbide (SiC) |
| Purity | 99.9% |
| Color | Black |
| Density | 3.0–3.2 g/cm³ |
| Poisson's Ratio | 0.15–0.21 |
| Fracture Toughness | 2–4 MPa·m^1/2 |
| Vickers Hardness | 21–28 GPa |
| Flexural Strength | 400–600 MPa |
| Compressive Strength | 2200 MPa |
| Elastic Modulus | 400–450 GPa |
| Thermal Expansion (20–1000°C) | 4–4.6×10^-6/K |
| Thermal Conductivity | 100–230 W/m·K |
| Maximum Operating Temperature | 1300–1650°C |
| Electrical Resistivity | 1–4×10^5 Ω·cm |
| Appearance | Smooth, uniform, low-porosity black tray |
Manufacturing Methods: Pressureless sintering, hot pressing, CVD coating,
reaction-bonded.
Key Features
High Thermal Stability: Maintains performance at extreme
temperatures, suitable for sintering and semiconductor processing.
Mechanical Strength: High hardness and load-bearing capacity
prevent deformation or cracking.
Chemical Resistance: Withstands strong acids, alkalis, and
corrosive chemicals.
Thermal Conductivity: Efficient heat transfer for uniform
processing temperatures.
Low Thermal Expansion: Ensures dimensional stability under thermal
cycling.
Electrical Insulation: Provides reliable insulation for electronic
applications.
CVD Coating Options: Available for enhanced wear resistance and
thermal shock protection.
Customizable Sizes & Shapes: Supports specific process
requirements.
Applications
Semiconductor Manufacturing: Supports LED and wafer chips in epitaxy, diffusion, and oxidation
processes.
High-Temperature Sintering: Provides stable support for ceramics and metals during sintering.
Chemical Processing: Handles aggressive chemicals safely in industrial or laboratory
setups.
Electronics & Optics Production: Supports substrates and optical components requiring precise
thermal control.
Aerospace & Automotive: Lightweight, strong trays suitable for components needing thermal
management and corrosion resistance.
Medical Device Manufacturing: Suitable for chemical-resistant and sterilizable trays.
Battery Production & Solar Industry: Supports high-temperature processes for lithium-ion batteries and
photovoltaic cells.
Laboratory & R&D: Ideal for experiments involving high heat or corrosive materials.
Powder Metallurgy & Glass/Ceramic Industry: Ensures uniform heating and reliable process control.
Advantages
High purity and chemical inertness reduce contamination risk.
Stable mechanical properties under extreme conditions.
Excellent wear resistance for long-term use.
Lightweight yet durable for easy handling.
Versatile for multiple industrial applications.
Packaging
All Silicon Carbide Ceramic Tray are carefully packaged to minimize
damage during storage and transportation, ensuring products arrive
in pristine condition.
FAQ
1 Can SiC ceramic trays withstand extreme temperatures during
semiconductor manufacturing?
Yes, SiC ceramic trays are designed to withstand continuous
operating temperatures of up to 1650°C, making them ideal for
high-temperature processes such as epitaxy, diffusion, and
oxidation in semiconductor and LED production.
2 How resistant are SiC trays to corrosion and chemical exposure?
SiC trays offer outstanding chemical resistance to strong acids,
alkalis, plasma, and other corrosive environments. This makes them
highly reliable for use in semiconductor processing, chemical
reaction vessels, and other harsh industrial environments where
material integrity is critical.
3 Are SiC ceramic trays customizable in terms of size, shape, and
coating?
Yes, SiC ceramic trays can be customized to meet specific
requirements, including dimensions, thickness, and surface finish.
Additionally, we offer CVD coatings for enhanced wear resistance
and improved thermal shock resistance, depending on your
application needs.
Summary
ZMSH Silicon Carbide Ceramic Trays combine thermal, chemical, and
mechanical excellence to provide a reliable platform for
semiconductor wafers and advanced manufacturing processes. Their
high precision, corrosion resistance, and thermal stability make
them essential components in modern high-tech industries.
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